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0-5 years of experience
Coordinated with integrators and gathered requirements to develop new etch process for future CMOS devices
- Developed etch process for oxide, nitride, dielectric and carbon based materials in ICP, CCP and Microwave plasma chambers
- Worked closely with Nanowire, DNA, Photonics, Phase Change Memory (PCM), MRAM Research and Development projects to develop successful etching process
- Facilitated and contributed extensively in creating endpoint algorithms for several etch processes for AMAT Centura tool
- Maintained etch tool by monitoring contamination, cleaning chambers and running twice-a-week periodic qualifications
- Trained several other process engineers successfully for the AMAT Centura tool and for other sectors.
- Experienced in several ellipsometry and profilometry tools including Tencor F5 machine
0-5 years of experience
Developed fabrication processes for thin film silicon solar cells, in a start-up company.
- Contributed design and analysis to teams building custom tools for silicon-glass anodic bonding and for vapor phase fluoride etching of bulk silicon.
- Modified a commercial reactive ion etch tool to create textured silicon for high efficiency solar cells.
- Initiated design of a proprietary process and tool for plasma ion implantation.
- Assisted design and specification of a cleanroom facility for prototyping and small scale production of solar cells.
0-5 years of experience
Developed novel APCVD process for AlN and GaN films on silicon
- Optimized metal, silicon oxide and silicon nitride thin films for III-V semiconductor photonic devices using deposition methods such as PECVD, ebeam evaporation, and sputtering
- Optimized RTP process for improved electrical properties
- Performed wet and dry etching of CMOS-GaAs-GaN wafers
- Performed electrical characterization of device test structures and improved model for extracting device parameter
- Characterized wafers using SEM/EDAX, FTIR, AFM, and reflectometry
0-5 years of experience
Responsible for quality semiconductor processing in MRL Metals and Dielectrics Sectors
- Process wafers using Applied Materials, Novellus, ULVAC, TEL, and Cambridge Nanotech systems
- Lead and organize sector operations
- Involved in process and procedural development
0-5 years of experience
- Led a team of 4 senior process engineers in production and development of all semiconductor sputtering, evaporation and PECVD processes
- MMIC Visual Inspection Lead responsible for training engineering and technician personnel and sustaining visual inspection processes
- Developed processes for sputtering and evaporation of thin films on InP and GaAs wafers for 3" production and 4" development of HEMT and HBT devices
- Member of interdisciplinary team working on DARPA program for GaN HEMT development as thin film deposition and anneal engineer
0-5 years of experience
Responsible for developing and characterizing new metal deposition and thin film processes. Participate on New Product development teams by developing processes for new products and transferring those processes into production.
- Establish and support process controls (SPC) as well as design and coordinate experiments for process improvement.
- Work with maintenance in purchasing and installing new thin film deposition and metrology equipment as well as upgrades for existing equipment.
- Assist with analysis of customer returns and provide responses in 8D format. Work with customers in qualifying process changes, visiting customers as necessary.
- Participate and lead problem-solving teams. Participate on full process and change PFMEA (Process Failure Mode and Effects Analysis) teams. Filed for patent relating to Aluminum corrosion.
0-5 years of experience
Performed various probe testing for n-type MOS devices
- Performed various duties to create spherical integrated circuits, accelerometers, and MEMS devices
- Worked with various gas flow and lithography systems
- Performed various techniques to ensure acceptable quality for final product
- Worked on various custom projects such as wireless temperature sensors and 3D accelerometer
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